This course covers the fundamentals of MEMS, microfabrication techniques, MEMS materials, MEMS device principle of operation, design, simulation and fabrication. Different types of MEMS sensors and actuators are introduced in this course i.e. MEMS Electrostatic Sensor, MEMS Electrostatic Actuator, MEMS Thermal Sensor, MEMS Thermal Actuator, MEMS Piezoresistive Sensor, MEMS Piezoelectric Sensor and MEMS Piezoelectric Actuator. The course team project provides students experience in MEMS device design and analysis using Finite Element Method/Analysis (FEM/FEA) simulation tool and fabrication simulation using Computer Aided Design (CAD) tool. At the end of the course, the students are expected to be able to design and simulate MEMS devices.
